Original Effect of sputtering power on microstructure and corrosion properties of TiO2 films deposited by reactive magnetron sputtering

The effect of sputtering power on the microstructure, anti-corrosion and anti-fouling properties of TiO2 films deposited on 5083 aluminum (Al) alloy by reactive magnetron sputtering at room temperature were investigated systematically. The results show that the TiO2 film mainly consists of anatase, and it is composed of spherical shaped and pyramidal particles. Both the anti-corrosion and anti-bacterial properties first improve with increasing sputter power. As the power is 12 kW, the combination of anti-corrosion and anti-bacterial properties is the best, the corrosion potential (E-corr), current density ((Icorr)), polarization resistance (R-p) and density of bacteria are -0.25 V, 0.36 mA/cm(2), 2255.5 U/ cm2 and 73 cell/mm(2), respectively. (C) 2022 The Author(s). Published by Elsevier B.V.

Automated summary

This study systematically investigated the effect of sputtering power on the microstructure, anti-corrosion, and anti-fouling properties of TiO2 films deposited on 5083 aluminum alloy at room temperature. The results showed that the TiO2 film mainly consisted of anatase and was composed of spherical and pyramidal particles. Increasing sputter power improved both the anti-corrosion and anti-bacterial properties. The best combination of anti-corrosion and anti-bacterial properties was observed at a power of 12 kW.