Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 46, Issue 6, Pages 3695-3701Publisher
SPRINGER
DOI: 10.1007/s11664-016-5131-z
Keywords
One-photon absorption; direct laser writing; plasmonics; thermal annealing; lift-off
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Funding
- French National Research Agency (ANR) as part of the Investissements d'Avenir program (Labex NanoSaclay) [ANR-10-LABX-0035]
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We present a recent investigation of fabrication of desired plasmonic structures. First, the polymeric templates were realized by a simple and low-cost fabrication technique based on direct laser writing with a continuous-wave laser source. The plasmonic structures have been then realized by two methods, namely, a combination of gold evaporation and lift-off techniques, and a combination of gold sputtering and thermal annealing techniques. Each method presents its own advantages. Numerous metallic submicro- and nano-structures have been realized, which should be very interesting for different applications, such as high-transmission bandpass filters, plasmonic data storage, and plasmonic photonic devices.
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