Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 45, Issue 7, Pages 3546-3553Publisher
SPRINGER
DOI: 10.1007/s11664-016-4514-5
Keywords
IBAD; biaxial texture; nucleation stage; MgO films
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Funding
- National Science Foundation of China [91421110]
- National Basic Research 2015CB358600 Program (973) of China [2015CB358600]
- Sichuan Youth Science and Technology Innovation Research Team Funding [2011JTD0006]
- Sichuan Provincial Fund for Distinguished Young Academic and Technology Leaders [2014JQ0011]
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The growth of multifunctional thin films on flexible substrates is important technologically, because flexible electronics require such a platform. In this study, we examined the evolution of biaxial texture in MgO films prepared using ion beam-assisted deposition (IBAD) on a Hastelloy substrate. Texture and microstructure developments were characterized through in situ reflection high-energy electron diffraction monitoring, x-ray diffraction, and atomic force microscopy, which demonstrated that biaxial texture was developed during the nucleation stage (similar to 2.2 nm). The best biaxial texture was obtained with a thickness of approximately 12 nm. As MgO continued to grow, the influence of surface energy was reduced, and film growth was driven by the attempt to minimize volume free-energy density. Thus the MgO grains were subsequently rotated at the (002) direction toward the ion beam. In addition, an approach was developed for accelerating in-plane texture evolution by pre-depositing an amorphous MgO layer before IBAD.
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