4.7 Article

Mid-infrared supercontinuum-based Fourier transform spectroscopy for plasma analysis

Journal

SCIENTIFIC REPORTS
Volume 12, Issue 1, Pages -

Publisher

NATURE PORTFOLIO
DOI: 10.1038/s41598-022-13787-w

Keywords

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Funding

  1. EU H2020-ICT-37 (TRIAGE project) [101015825]
  2. EU H2020-ICT-2016-1 (FLAIR project) [732968]
  3. China Scholarship Council (CSC) [202006500008]

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Broadband mid-infrared spectroscopy is an important diagnostic technique for reactive plasmas. The use of a novel MIR supercontinuum source in combination with a custom-built FTIR spectrometer allows for accurate identification and quantification of various reaction products, even those with overlapping absorbance features.
Broadband mid-infrared (MIR) spectroscopy is a well-established and valuable diagnostic technique for reactive plasmas. Plasmas are complex systems and consist of numerous (reactive) types of molecules; it is challenging to measure and control reaction specificity with a good sensitivity. Here, we demonstrate the first use of a novel MIR supercontinuum (SC) source for quantitative plasma spectroscopy. The SC source has a wide spectral coverage of 1300-2700 cm(-1) (wavelength range 3.7-7.7 mu m), thus enabling broadband multispecies detection. The high spatial coherence of the MIR SC source provides long interaction path lengths, thereby increasing the sensitivity for molecular species. The combination of such a SC source with a custom-built FTIR spectrometer (0.1 cm(-1) spectral resolution) allows detection of various gases with high spectral resolution. We demonstrate its potential in plasma applications by accurate identification and quantification of a variety of reaction products (e.g. nitrogen oxides and carbon oxides) under low-pressure conditions, including the molecular species with overlapping absorbance features (e.g. acetone, acetaldehyde, formaldehyde, etc.).

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