An optical waveguide microcantilever sensor with a dual-output waveguide readout

An optical waveguide microcantilever sensor with a dual-output waveguide readout is developed to obtain a linear response for the deflection of cantilever. A finite element method is employed to characterize the optical waveguide microcantilever sensor. A systematic and detailed discussion has been presented to describe an optical waveguide cantilever sensor with a dual-output waveguide. One can see that most of the results are interesting, even very different from general opinions. The design is a tradeoff of the sensitivity, linearity and operation range. These will be helpful for an optimized design of the microcantilever sensor.

Automated summary

In this paper, an optical waveguide microcantilever sensor with a dual-output waveguide readout is developed for obtaining a linear response to the deflection of the cantilever. The optical waveguide microcantilever sensor is characterized using the finite element method. A systematic and detailed discussion is presented on the design and unique results of the optical waveguide cantilever sensor with a dual-output waveguide. The study shows interesting and divergent results from general opinions, highlighting the trade-off between sensitivity, linearity, and operation range. These findings are valuable for optimizing the design of microcantilever sensors.