Journal
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
Volume 173, Issue -, Pages -Publisher
ACADEMIC PRESS LTD- ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ymssp.2022.109027
Keywords
Atomic force microscopy; Raster scanning; Tracking control; Repetitive control; Cross-coupling compensation
Categories
Funding
- National Natural Science Foundation of China [52105581, U2013211, 51975375]
- China Postdoctoral Science Foundation [2021M692065]
- Open Foundation of the State Key Laboratory of Fluid Power and Mechatronic Systems, China [GZKF-202003]
- CDSC Scholarship, University of Newcastle, Australia
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This article describes a method based on Model-free Repetitive Control (MFRC) for high performance control of a fast triangular trajectory in the X-axis of an atomic force microscope. The method achieves coupling compensation and reduces the requirement for accurate system models.
The image quality of an atomic force microscope highly depends on the tracking performance of the lateral X-Y axis scanner. To reduce the requirement for accurate system models, this article describes a method based on Model-free Repetitive Control (MFRC) for high performance control of fast triangular trajectories in the X-axis while simultaneously achieving coupling compensation from the X-axis to Y-axis. The design and stability analysis of the MFRC scheme are presented in detail. The tracking results are experimentally evaluated with a range of different load conditions, showing the efficacy of the method with large variations in plant dynamics. To address the coupling from the X-axis to the Y-axis while tracking the non periodic staircase trajectories, a pre-learning step is used to generate the compensation signals, which are combined with the baseline Proportional-Integral (PI) control in a feedforward manner in real-time implementations. This approach is also applied to address the problem of longer convergence if needed. Experimental tracking control and coupling compensation are demonstrated on a commercially available piezo-actuated scanner. The proposed method reduces the root-mean-square coupled tracking errors in Y-axis from 191.4 nm in open-loop control or 194.6 nm with PI control, to 2.8 nm with PI+MFRC control at 100 Hz tracking frequency, which demonstrates the significant improvement achieved by the proposed method.
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