4.7 Article

An area-variant type MEMS capacitive sensor based on a novel bionic swallow structure for high sensitive nano-indentation measurement

Related references

Note: Only part of the references are listed.
Article Engineering, Electrical & Electronic

A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation

Hong Ding et al.

Summary: This paper introduces a MEMS resonant accelerometer with high relative sensitivity based on the sensing scheme of electrostatically-induced stiffness perturbation. By lowering the resonant frequency and improving sensitivity through electrostatically-induced stiffness perturbation, the accelerometer shows a much higher relative sensitivity compared to traditional axial force sensing accelerometers. The device demonstrates a differential sensitivity of 297.5 Hz/g and a relative sensitivity of 1.8523 %/g, making it a potentially attractive option for highly-sensitive acceleration measurements.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2021)

Article Multidisciplinary Sciences

3D mechanical characterization of single cells and small organisms using acoustic manipulation and force microscopy

Nino F. Laeubli et al.

Summary: The authors combined a micro-force sensor with an acoustically controlled manipulation device to rotate biological samples and quantify mechanical properties at multiple regions of interest within a specimen. The versatility of this tool was demonstrated through the analysis of single Lilium longiflorum pollen grains and Caenorhabditis elegans nematodes, revealing local variations in apparent stiffness and providing previously inaccessible information on mechanical properties for biophysical modeling.

NATURE COMMUNICATIONS (2021)

Article Engineering, Electrical & Electronic

Pull-In Dynamics of Two MEMS Parallel-Plate Structures for Acceleration Measurement

Zhipeng Ma et al.

Summary: This paper investigates the pull-in dynamics of single-sided and double-sided parallel-plate structures employed in MEMS devices for acceleration measurement, developing a lumped electromechanical model and deriving critical pull-in displacement and voltage for both structures. The two parallel-plate structures exhibit distinct pull-in characteristics and different responses to external acceleration. Additionally, the effects of pressure on critical pull-in voltages are characterized, showing different behaviors for SSPP and DSPP structures.

IEEE SENSORS JOURNAL (2021)

Article Robotics

Robotic Manipulation of Deformable Cells for Orientation Control

Changsheng Dai et al.

IEEE TRANSACTIONS ON ROBOTICS (2020)

Article Engineering, Electrical & Electronic

Double-actuator position-feedback mechanism for adjustable sensitivity in electrostatic-capacitive MEMS force sensors

Alessandro Nastro et al.

SENSORS AND ACTUATORS A-PHYSICAL (2020)

Article Nanoscience & Nanotechnology

Force microscopy of the Caenorhabditis elegans embryonic eggshell

Roger Krenger et al.

MICROSYSTEMS & NANOENGINEERING (2020)

Article Engineering, Electrical & Electronic

A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor

Mohammad Maroufi et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)

Article Engineering, Electrical & Electronic

Realization of Multistage Detection Sensitivity and Dynamic Range in Capacitive Tactile Sensors

Yi-Rui Zhang et al.

IEEE SENSORS JOURNAL (2020)

Article Engineering, Electrical & Electronic

A Miniaturized EHT Platform for Accurate Measurements of Tissue Contractile Properties

Milica Dostanic et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)

Article Engineering, Electrical & Electronic

A method for improving out-of-plane robustness of an area-changed capacitive displacement transducer used in a micro-accelerometer

Shitao Yan et al.

SENSORS AND ACTUATORS A-PHYSICAL (2020)

Article Robotics

Towards a real-time 3D vision-based micro-force sensing probe

Georges Adam et al.

JOURNAL OF MICRO-BIO ROBOTICS (2020)

Article Automation & Control Systems

A Survey of Force-Assisted Robotic Cell Microinjection Technologies

Yuzhang Wei et al.

IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING (2019)

Article Engineering, Electrical & Electronic

The Design and Analysis of a Novel Micro Force Sensor Based on Depletion Type Movable Gate Field Effect Transistor

Wendi Gao et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2019)

Article Engineering, Electrical & Electronic

A low noise capacitive MEMS accelerometer with anti-spring structure

Hongcai Zhang et al.

SENSORS AND ACTUATORS A-PHYSICAL (2019)

Article Engineering, Biomedical

Micropipette Aspiration of Single Cells for Both Mechanical and Electrical Characterization

Huayan Pu et al.

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING (2019)

Article Nanoscience & Nanotechnology

High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

Brahim El Mansouri et al.

MICROSYSTEMS & NANOENGINEERING (2019)

Article Engineering, Electrical & Electronic

A Novel Design for Enhancing the Sensitivity of a Capacitive MEMS Device

Mithlesh Kumar et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2018)

Article Automation & Control Systems

An adjustable-stiffness MEMS force sensor: Design, characterization, and control

Mohammad Maroufi et al.

MECHATRONICS (2018)

Article Engineering, Electrical & Electronic

A Quasi-Concertina force-displacement MEMS probe for measuring biomechanical properties

David Grech et al.

SENSORS AND ACTUATORS A-PHYSICAL (2018)

Article Engineering, Electrical & Electronic

Design of a PVDF-MFC Force Sensor for Robot-Assisted Single Cell Microinjection

Yuzhang Wei et al.

IEEE SENSORS JOURNAL (2017)

Article Physics, Applied

Dynamic mechanical measurement of the viscoelasticity of single adherent cells

Elise A. Corbin et al.

APPLIED PHYSICS LETTERS (2016)

Article Engineering, Industrial

Nanoindentation: Measuring methods and applications

D. A. Lucca et al.

CIRP ANNALS-MANUFACTURING TECHNOLOGY (2010)