Related references
Note: Only part of the references are listed.A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation
Hong Ding et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2021)
3D mechanical characterization of single cells and small organisms using acoustic manipulation and force microscopy
Nino F. Laeubli et al.
NATURE COMMUNICATIONS (2021)
Pull-In Dynamics of Two MEMS Parallel-Plate Structures for Acceleration Measurement
Zhipeng Ma et al.
IEEE SENSORS JOURNAL (2021)
Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing
C. Li et al.
EXPERIMENTAL MECHANICS (2020)
Robotic Manipulation of Deformable Cells for Orientation Control
Changsheng Dai et al.
IEEE TRANSACTIONS ON ROBOTICS (2020)
Double-actuator position-feedback mechanism for adjustable sensitivity in electrostatic-capacitive MEMS force sensors
Alessandro Nastro et al.
SENSORS AND ACTUATORS A-PHYSICAL (2020)
A MEMS nanoindenter with an integrated AFM cantilever gripper for nanomechanical characterization of compliant materials
Z. Li et al.
NANOTECHNOLOGY (2020)
Force microscopy of the Caenorhabditis elegans embryonic eggshell
Roger Krenger et al.
MICROSYSTEMS & NANOENGINEERING (2020)
Microelectromechanical Systems for Nanomechanical Testing: Displacement- and Force-Controlled Tensile Testing with Feedback Control
C. Li et al.
EXPERIMENTAL MECHANICS (2020)
A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor
Mohammad Maroufi et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)
Realization of Multistage Detection Sensitivity and Dynamic Range in Capacitive Tactile Sensors
Yi-Rui Zhang et al.
IEEE SENSORS JOURNAL (2020)
A Miniaturized EHT Platform for Accurate Measurements of Tissue Contractile Properties
Milica Dostanic et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)
A method for improving out-of-plane robustness of an area-changed capacitive displacement transducer used in a micro-accelerometer
Shitao Yan et al.
SENSORS AND ACTUATORS A-PHYSICAL (2020)
Precise Automated Intracellular Delivery Using a Robotic Cell Microscope System With Three-Dimensional Image Reconstruction Information
Wendi Gao et al.
IEEE-ASME TRANSACTIONS ON MECHATRONICS (2020)
Towards a real-time 3D vision-based micro-force sensing probe
Georges Adam et al.
JOURNAL OF MICRO-BIO ROBOTICS (2020)
A Survey of Force-Assisted Robotic Cell Microinjection Technologies
Yuzhang Wei et al.
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING (2019)
The Design and Analysis of a Novel Micro Force Sensor Based on Depletion Type Movable Gate Field Effect Transistor
Wendi Gao et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2019)
A low noise capacitive MEMS accelerometer with anti-spring structure
Hongcai Zhang et al.
SENSORS AND ACTUATORS A-PHYSICAL (2019)
Micropipette Aspiration of Single Cells for Both Mechanical and Electrical Characterization
Huayan Pu et al.
IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING (2019)
High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout
Brahim El Mansouri et al.
MICROSYSTEMS & NANOENGINEERING (2019)
3-D Image Reconstruction of Biological Organelles With a Robot-Aided Microscopy System for Intracellular Surgery
Wendi Gao et al.
IEEE ROBOTICS AND AUTOMATION LETTERS (2019)
A Novel Design for Enhancing the Sensitivity of a Capacitive MEMS Device
Mithlesh Kumar et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2018)
An adjustable-stiffness MEMS force sensor: Design, characterization, and control
Mohammad Maroufi et al.
MECHATRONICS (2018)
A Quasi-Concertina force-displacement MEMS probe for measuring biomechanical properties
David Grech et al.
SENSORS AND ACTUATORS A-PHYSICAL (2018)
Design of a PVDF-MFC Force Sensor for Robot-Assisted Single Cell Microinjection
Yuzhang Wei et al.
IEEE SENSORS JOURNAL (2017)
Dynamic mechanical measurement of the viscoelasticity of single adherent cells
Elise A. Corbin et al.
APPLIED PHYSICS LETTERS (2016)
Development of a Microforce Sensor and Its Array Platform for Robotic Cell Microinjection Force Measurement
Yu Xie et al.
SENSORS (2016)
Nanoindentation: Measuring methods and applications
D. A. Lucca et al.
CIRP ANNALS-MANUFACTURING TECHNOLOGY (2010)