4.3 Article

Dissociation channels of c-C4F8 to C2F4 in reactive plasma

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 61, Issue 10, Pages -

Publisher

IOP Publishing Ltd
DOI: 10.35848/1347-4065/ac895e

Keywords

fragmentation; RIE; process plasma; computational study

Ask authors/readers for more resources

Progress in computational methods and personal computing has allowed for more accurate estimations of primary dissociation channels and energies, revealing important insights into the pathways and energies involved in dissociation and electron attachment processes.
Progress in computational methods and personal computing has made possible more accurate estimations for primary dissociation channels and energies. The main dissociation route is revealed to be via the 7E excited state with an energy of 12.23 eV, which is composed of transitions from the highest occupied molecular orbital with b(1) symmetry to some degenerate unoccupied e molecular orbitals. The main contributing e orbitals consisted of antibonding combination of C2F4 pi-bonding orbitals. This degenerate 7E state is lowered by non-adiabatic transitions through the conical interactions on the dissociating route to 2C(2)F(4), so the energy is finally relaxed at the dissociative second lowest 1E excited state leading to 2C(2)F(4) production. In the electron attachment process, the calculated results show that the F- ion is produced from the excited states of the D-4h c-C4F8 (-) ion through conical interactions at the energies of 4.3 eV, 5.6 eV, and 5.0 eV, along the C-F dissociation route.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.3
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available