4.6 Article

High-Performance AlGaN/GaN HEMTs With Hybrid Schottky-Ohmic Drain for Ka-Band Applications

Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 69, Issue 8, Pages 4188-4193

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2022.3182294

Keywords

Wide band gap semiconductors; HEMTs; MODFETs; Logic gates; Aluminum gallium nitride; Electric breakdown; Breakdown voltage; AlGaN/GaN high-electron-mobility transistors (HEMTs); breakdown voltage; current collapse; hybrid Schottky-ohmic drain; millimeter-wave (mmW)

Funding

  1. National Key Research and Development Program of China [2020YFB1804902]
  2. National Natural Science Foundation of China [61904135, 62090014, 62174125, 62131014]
  3. China Postdoctoral Science Foundation [BX20200262]
  4. Key Research and Development Programof Guangzhou [202103020002]
  5. Fundamental Research Funds for the Central Universities [QTZX22022, XJS221110]
  6. Wuhu and Xidian University special fund for IndustryUniversity-Research Cooperation [XWYCXY-012021014-HT]

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A hybrid Schottky-ohmic drain technology is proposed for high-frequency transistors, which can significantly improve the performance of the devices, including reducing resistance, increasing breakdown voltage, suppressing current collapse, and maintaining good DC and RF characteristics after large-signal measurements.
A hybrid Schottky-ohmic drain technology for millimeter-wave (mmW) AlGaN/GaN high-electron-mobility transistors (HEMTs) is proposed. The Schottky metal extension in the ohmic region of drain reduces the actual source-drain spacing, resulting in a smaller ON-resistance and a higher maximum current. Extended Schottky metal in the drain region modulates the electric-field distribution, thereby leading to an improved breakdown voltage, suppressed current collapse, and high reliability. Compared with the ohmic drain, the current gain cutoff frequency (f(T)) was improved from 64 to 76 GHz, and the maximum oscillation frequency (f(max)) was improved from 125 to 157 GHz, resulting from the decreased parasitic drain resistance (R-d). Moreover, large-signal measurements in continuous wave (CW) at 30 GHz demonstrated a peak power-added efficiency (PAE) of 45.5% and a saturated output power density (P-sat) of 8.5 W/mm at V-ds = 30 V. In addition, the direct current (DC) and radio frequency (RF) characteristics showed a negligible degradation after large-signal measurements at 30 GHz.

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