Journal
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY
Volume 22, Issue 2, Pages 205-216Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TDMR.2022.3159991
Keywords
Electric breakdown; Discharges (electric); Micromechanical devices; Cathodes; Electric fields; Surface morphology; Plasmas; Ambient gasses; capacitors; controlled environment; corrosion; electric discharge; field emission; MEMS; townsend discharge; subnormal glow discharge; vacuum
Funding
- National Research Infrastructure on nanotechnology, advanced materials, and micro/nanoelectronics - Operational Programme Competitiveness, Entrepreneurship and Innovation (NSRF 2014-2020) [MIS 5002772]
- European Union (European Regional Development Fund)
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This study investigates the impact of ambient on the field emission of rigid MEMS capacitive structure and the resulting breakdown induced damage. The findings include asperities burning due to Joule heating and explosive breakdown, which leads to mirror-like craters on the cathode and anode electrodes. In vacuum, there is a linear relation between crater diameter and breakdown current. However, in ambient atmosphere, breakdown results in large amplitude current oscillations and extended damage on both electrodes.
The impact of ambient on the field emission and the resulting breakdown induced damage of rigid MEMS capacitive structure are investigated. The effect of asperities burning due to Joule heating and the resulting explosive breakdown are presented. The breakdown gives rise to almost mirror craters formation on the cathode and anode electrodes. A linear relation between crater diameter and the breakdown current is found when breakdown occurs in vacuum. In ambient atmosphere the breakdown leads to large amplitude current oscillations and the formation of extended damage on both electrodes.
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