Journal
IEEE SENSORS JOURNAL
Volume 22, Issue 12, Pages 11248-11255Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2021.3110304
Keywords
Sensors; Temperature measurement; Pressure measurement; Wires; Temperature sensors; Aerodynamics; Atmospheric measurements; Aerodynamic wall pressure micro-sensor; MEMS; Pirani sensor; pressure sensor
Funding
- French National Research Agency (ANR) [ANR-14-ASTR-0023-01]
- Regional Platform CONTRAERO
- European Union
- European Regional Development Fund
- Hauts de France Region Council
- RENATECH
- French national nanofabrication network
- Innovation Defense Agency (AID)
- FEDER
- French State
- Agence Nationale de la Recherche (ANR) [ANR-14-ASTR-0023] Funding Source: Agence Nationale de la Recherche (ANR)
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This paper presents the first demonstration of aerodynamic wall pressure measurement using a thermal Pirani effect based micro-sensor, which successfully measured the pressure changes in a turbulent boundary layer wind tunnel.
This paper presents and discusses the first demonstration of aerodynamic wall pressure measurement using a thermal Pirani effect based micro-sensor. The thermal micro-sensor is designed as a suspended micro-hot-wire separated from the substrate by a nanoscale gap, and mechanically supported by perpendicular micro-bridges. The micro-sensor was calibrated for pressure measurement from 10 kPa to 800 kPa. It was then used as aerodynamic wall pressure sensor in a turbulent boundary layer wind tunnel and successfully measured the 1.1 kPa depression occurring in the wind tunnel when the flow velocity goes up to 40 m/s.
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