33 GHz Overmoded Bulk Acoustic Resonator

Article Engineering, Electrical & Electronic

Millimeter-Wave CMOS 30/80 GHz Sharp-Rejection Dual-Band Bandstop Filters Using TFMS Open-Stepped-Impedance Resonators

Venkata Narayana Rao Vanukuru et al.

Summary: This paper introduces dual-band bandstop filters (DBBSF) for millimeter-wave operation at 30/80 GHz bands in 0.18 μm CMOS process. The design is based on TFMS shunt open-ended stepped-impedance resonators, allowing for dual stopband response and impedance controlled center frequencies.

IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS II-EXPRESS BRIEFS (2021)

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Article Engineering, Electrical & Electronic

Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)

Pietro Simeoni et al.

Summary: In this study, a novel piezoelectric nanoscale ultrasound transducer (pNUT) design was proposed to achieve high sensitivity while mitigating residual stress effects associated with thickness scaling. An equivalent circuit model and experimental data validation were used to demonstrate the high sensitivity of the design in a small area. Compared to other ultrasound sensors in the literature, the pNUT design showed significantly improved sensitivity performance per unit area.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2021)

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Article Nanoscience & Nanotechnology

Thermal Conductivity of Aluminum Scandium Nitride for 5G Mobile Applications and Beyond

Yiwen Song et al.

Summary: RF MEMS based on Al1-xScxN are being favored over AlN-based devices for their higher achievable bandwidths suitable for 5G networks. However, overheating of Al1-xScxN FBARs limits power handling, and reducing abnormally oriented grain density improves thermal performance of the devices.

ACS APPLIED MATERIALS & INTERFACES (2021)

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Proceedings Paper Engineering, Electrical & Electronic

ALUMINUM NITRIDE COMBINED OVERTONE RESONATOR FOR MILLIMETER WAVE 5G APPLICATIONS

Meruyert Assylbekova et al.

Summary: This paper presents the first Aluminum Nitride (AlN) Combined Overtone Resonator (COR) in the 5G millimeter wave (mmWave) spectrum, with high performance and low loss, making it suitable for the implementation of multi-frequency filters.

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) (2021)

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Article Engineering, Electrical & Electronic