Related references
Note: Only part of the references are listed.Redefining Monitoring Rules for Intelligent Fault Detection and Classification via CNN Transfer Learning for Smart Manufacturing
Chen-Fu Chien et al.
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2022)
Adaptive parametric yield enhancement via collinear multivariate analytics for semiconductor intelligent manufacturing
Chen-Fu Chien et al.
APPLIED SOFT COMPUTING (2021)
Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process
Ki Bum Lee et al.
JOURNAL OF INTELLIGENT MANUFACTURING (2020)
Tool allocation to smooth work-in-process for cycle time reduction and an empirical study
Chen-Fu Chien et al.
ANNALS OF OPERATIONS RESEARCH (2020)
Joint modeling of classification and regression for improving faulty wafer detection in semiconductor manufacturing
Seokho Kang
JOURNAL OF INTELLIGENT MANUFACTURING (2020)
Dynamic Support Vector Regression Control System for Overlay Error Compensation With Stochastic Metrology Delay
Marzieh Khakifirooz et al.
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING (2020)
Deep reinforcement learning for selecting demand forecast models to empower Industry 3.5 and an empirical study for a semiconductor component distributor
Chen-Fu Chien et al.
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH (2020)
Minimax Optimization for Recipe Management in High-Mixed Semiconductor Lithography Process
Marzieh Khakifirooz et al.
IEEE TRANSACTIONS ON INDUSTRIAL INFORMATICS (2020)
Advanced Quality Control (AQC) of Silicon Wafer Specifications for Yield Enhancement for Smart Manufacturing
Chen-Fu Chien et al.
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2020)
Data-Driven Framework for Tool Health Monitoring and Maintenance Strategy for Smart Manufacturing
Chen-Fu Chien et al.
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2020)
Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication
Marzieh Khakifirooz et al.
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING (2019)
Bayesian inference for mining semiconductor manufacturing big data for yield enhancement and smart production to empower industry 4.0
Marzieh Khakifirooz et al.
APPLIED SOFT COMPUTING (2018)
Strategic capacity planning for smart production: Decision modeling under demand uncertainty
Chen-Fu Chien et al.
APPLIED SOFT COMPUTING (2018)
Multitask learning for virtual metrology in semiconductor manufacturing systems
Chanhee Park et al.
COMPUTERS & INDUSTRIAL ENGINEERING (2018)
Assessment of Data Suitability for Machine Prognosis Using Maximum Mean Discrepancy
Xiaodong Jia et al.
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS (2018)
On Effectiveness of Transfer Learning Approach for Neural Network-Based Virtual Metrology Modeling
Seokho Kang
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2018)
A Computer Vision-Inspired Deep Learning Architecture for Virtual Metrology Modeling With 2-Dimensional Datale
Marco Maggipinto et al.
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2018)
Gaussian Process Regression for Virtual Metrology-Enabled Run-to-Run Control in Semiconductor Manufacturing
Jian Wan et al.
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2018)
An empirical study of demand forecasting of non-volatile memory for smart production of semiconductor manufacturing
Ying-Jen Chen et al.
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH (2018)
Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement
Chen-Fu Chien et al.
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH (2017)
An intelligent virtual metrology system with adaptive update for semiconductor manufacturing
Seokho Kang et al.
JOURNAL OF PROCESS CONTROL (2017)
A deep learning-based approach to material removal rate prediction in polishing
Peng Wang et al.
CIRP ANNALS-MANUFACTURING TECHNOLOGY (2017)
Building energy saving performance indices for cleaner semiconductor manufacturing and an empirical study
Chen-Fu Chien et al.
COMPUTERS & INDUSTRIAL ENGINEERING (2016)
A Novel Route Selection and Resource Allocation Approach to Improve the Efficiency of Manual Material Handling System in 200-mm Wafer Fabs for Industry 3.5
Chen-Fu Chien et al.
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING (2016)
Big Data Capabilities Applied to Semiconductor Manufacturing Advanced Process Control
James Moyne et al.
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2016)
A novel approach to hedge and compensate the critical dimension variation of the developed-and-etched circuit patterns for yield enhancement in semiconductor manufacturing
Chen-Fu Chien et al.
COMPUTERS & OPERATIONS RESEARCH (2015)
Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach
Gian Antonio Susto et al.
COMPUTERS & OPERATIONS RESEARCH (2015)
Enhancement of the Virtual Metrology Performance for Plasma-Assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters
Seolhye Park et al.
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2015)
A back-propagation neural network with a distributed lag model for semiconductor vendor-managed inventory
Chia-Yu Hsu et al.
JOURNAL OF INDUSTRIAL AND PRODUCTION ENGINEERING (2015)
Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller
Chen-Fu Chien et al.
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING (2014)
A Framework for Root Cause Detection of Sub-Batch Processing System for Semiconductor Manufacturing Big Data Analytics
Chen-Fu Chien et al.
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2014)
Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition
Hendrik Purwins et al.
IEEE-ASME TRANSACTIONS ON MECHATRONICS (2014)
Hierarchical indices to detect equipment condition changes with high dimensional data for semiconductor manufacturing
Hui-Chun Yu et al.
JOURNAL OF INTELLIGENT MANUFACTURING (2014)
An empirical study of design-of-experiment data mining for yield-loss diagnosis for semiconductor manufacturing
Chen-Fu Chien et al.
JOURNAL OF INTELLIGENT MANUFACTURING (2014)
Probabilistic local reconstruction for k-NN regression and its application to virtual metrology in semiconductor manufacturing
Seung-kyung Lee et al.
NEUROCOMPUTING (2014)
A virtual metrology system based on least angle regression and statistical clustering
Gian Antonio Susto et al.
APPLIED STOCHASTIC MODELS IN BUSINESS AND INDUSTRY (2013)
Semiconductor fault detection and classification for yield enhancement and manufacturing intelligence
Chen-Fu Chien et al.
FLEXIBLE SERVICES AND MANUFACTURING JOURNAL (2013)
VM-Based Baseline Predictive Maintenance Scheme
Yao-Sheng Hsieh et al.
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2013)
A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence
Chen-Fu Chien et al.
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH (2013)
An integrated advanced process control framework using run-to-run control, virtual metrology and fault detection
Shu-Kai S. Fan et al.
JOURNAL OF PROCESS CONTROL (2013)
Feature extraction for defect classification and yield enhancement in color filter and micro-lens manufacturing: An empirical study
Ying-Jen Chen et al.
JOURNAL OF INDUSTRIAL AND PRODUCTION ENGINEERING (2013)
Virtual metrology for run-to-run control in semiconductor manufacturing
Pilsung Kang et al.
EXPERT SYSTEMS WITH APPLICATIONS (2011)
Selection Schemes of Dual Virtual-Metrology Outputs for Enhancing Prediction Accuracy
Wei-Ming Wu et al.
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING (2011)
UNISON analysis to model and reduce step-and-scan overlay errors for semiconductor manufacturing
Chen-Fu Chien et al.
JOURNAL OF INTELLIGENT MANUFACTURING (2011)
Manufacturing intelligence for semiconductor demand forecast based on technology diffusion and product life cycle
Chen-Fu Chien et al.
INTERNATIONAL JOURNAL OF PRODUCTION ECONOMICS (2010)
A virtual metrology system for semiconductor manufacturing
Pilsung Kang et al.
EXPERT SYSTEMS WITH APPLICATIONS (2009)
Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares
Aftab A. Khan et al.
JOURNAL OF PROCESS CONTROL (2008)
Economic efficiency analysis of wafer fabrication
Robert C. Leachman et al.
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING (2007)
Data mining for yield enhancement in semiconductor manufacturing and an empirical study
Chen-Fu Chien et al.
EXPERT SYSTEMS WITH APPLICATIONS (2007)