Journal
CHINESE PHYSICS B
Volume 31, Issue 11, Pages -Publisher
IOP Publishing Ltd
DOI: 10.1088/1674-1056/ac7c02
Keywords
TGG crystal; optical waveguide; ion implantation; precise diamond blade dicing
Categories
Funding
- Postgraduate Research and Practice Innovation Program of Jiangsu Province, China [SJCX21_0274]
- National Natural Science Foundation of China [11405041, 61905119]
- Scientific Research Foundation for Youths by Jiangxi Province Science Foundation, China [20192BAB217015]
- University Natural Science Research Project of Jiangsu Province, China [19KJB140013]
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In this study, He+-implanted and diamond blade-diced TGG crystal planar and ridge waveguides were fabricated for integrated magneto-optical devices. The optical properties of these waveguides were investigated by measuring spectra and reconstructing refractive index profiles.
Terbium gallium garnet (Tb3Ga5O12, TGG) crystal can be used to fabricate various magneto-optical devices due to its optimal Faraday effect. In this work, 400-keV He+ ions with a fluence of 6.0 x 10(16) ions/cm(2) are irradiated into the TGG crystal for the planar waveguide formation. The precise diamond blade dicing with a rotation speed of 2 x 10(4) rpm and a cutting velocity of 0.1 mm/s is performed on the He+-implanted TGG planar waveguide for the ridge structure. The dark-mode spectrum of the He+-implanted TGG planar waveguide is measured by the prism-coupling method, thereby obtaining the relationship between the reflected light intensity and the effective refractive index. The refractive index profile of the planar waveguide is reconstructed by the reflectivity calculation method. The near-field light intensity distribution of the planar waveguide and the ridge waveguide are recorded by the end-face coupling method. The He+-implanted and diamond blade-diced TGG crystal planar and ridge waveguides are promising candidates for integrated magneto-optical devices.
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