4.7 Article

Hydrogen plasma enhanced oxide removal on GaSb planar and nanowire surfaces

Related references

Note: Only part of the references are listed.
Article Nanoscience & Nanotechnology

Performance enhancement of GaSb vertical nanowire p-type MOSFETs on Si by rapid thermal annealing

Zhongyunshen Zhu et al.

Summary: This study demonstrates that the performance of GaSb-based devices can be improved through rapid thermal annealing, making them suitable for low-power logic applications and RF applications.

NANOTECHNOLOGY (2022)

Article Engineering, Electrical & Electronic

High-density logic-in-memory devices using vertical indium arsenide nanowires on silicon

Mamidala Saketh Ram et al.

Summary: By integrating a vertical transistor and resistive memory on silicon, a compact cell capable of Boolean logic operations can be created.

NATURE ELECTRONICS (2021)

Article Engineering, Electrical & Electronic

Gate-Length Dependence of Vertical GaSb Nanowire p-MOSFETs on Si

Adam Jonsson et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2020)

Article Engineering, Electrical & Electronic

Atomic Layer Deposition of Hafnium Oxide on InAs: Insight from Time-Resolved in Situ Studies

Giulio D'Acunto et al.

ACS APPLIED ELECTRONIC MATERIALS (2020)

Article Engineering, Electrical & Electronic

Vertical Nanowire TFETs With Channel Diameter Down to 10 nm and Point S-MIN of 35 mV/Decade

Elvedin Memisevic et al.

IEEE ELECTRON DEVICE LETTERS (2018)

Article Nanoscience & Nanotechnology

Oxidation-Induced Changes in the ALD-Al2O3/InAs(100) Interface and Control of the Changes for Device Processing

Marjukka Tuominen et al.

ACS APPLIED MATERIALS & INTERFACES (2018)

Article Engineering, Electrical & Electronic

Scaling of Vertical InAs-GaSb Nanowire Tunneling Field-Effect Transistors on Si

Elvedin Memisevic et al.

IEEE ELECTRON DEVICE LETTERS (2016)

Article Physics, Applied

Narrow gap nanowires: From nanotechnology to RF-circuits on Si

L. -E. Wernersson

JOURNAL OF APPLIED PHYSICS (2015)

Article Chemistry, Multidisciplinary

III-V Nanowire Complementary Metal-Oxide Semiconductor Transistors Monolithically Integrated on Si

Johannes Svensson et al.

NANO LETTERS (2015)

Article Chemistry, Multidisciplinary

Electrical and Surface Properties of InAs/InSb Nanowires Cleaned by Atomic Hydrogen

James L. Webb et al.

NANO LETTERS (2015)

Article Materials Science, Multidisciplinary

III-V compound semiconductor transistors-from planar to nanowire structures

Heike Riel et al.

MRS BULLETIN (2014)

Article Engineering, Electrical & Electronic

GaSb oxide thermal stability studied by dynamic-XPS

Stephen McDonnell et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2014)

Article Materials Science, Multidisciplinary

Bandgap engineering in a nanowire: self-assembled 0, 1 and 2D quantum structures

Jordi Arbiol et al.

MATERIALS TODAY (2013)

Article Physics, Applied

Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure

Laura B. Ruppalt et al.

APPLIED PHYSICS LETTERS (2012)

Article Physics, Applied

Interface composition of InAs nanowires with Al2O3 and HfO2 thin films

R. Timm et al.

APPLIED PHYSICS LETTERS (2011)

Article Chemistry, Physical

In situ X-ray photoelectron spectroscopy characterization of Al2O3/GaSb interface evolution

S. McDonnell et al.

APPLIED SURFACE SCIENCE (2011)

Review Materials Science, Multidisciplinary

Interfacial chemistry of oxides on InxGa(1-x)As and implications for MOSFET applications

C. L. Hinkle et al.

CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE (2011)

Article Physics, Applied

An in situ examination of atomic layer deposited alumina/InAs(100) interfaces

A. P. Kirk et al.

APPLIED PHYSICS LETTERS (2010)

Article Physics, Applied

Reduction of native oxides on InAs by atomic layer deposited Al2O3 and HfO2

R. Timm et al.

APPLIED PHYSICS LETTERS (2010)

Article Physics, Applied

GaAs interfacial self-cleaning by atomic layer deposition

C. L. Hinkle et al.

APPLIED PHYSICS LETTERS (2008)