4.8 Article

Highly Sensitive Hydrogen Sensor Based on an Optical Driven Nanofilm Resonator

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 14, Issue 25, Pages 29357-29365

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.2c04105

Keywords

optomechanical resonator; hydrogen sensor; optical fiber sensor; palladium; nanofilm

Funding

  1. National Natural Science Foundation of China (NSFC) [62175165]
  2. Guangdong Basic and Applied Basic Research Foundation [2021A1515011834]
  3. Shenzhen Science and Technology Program [RCBS20200714114922296, JCYJ20210324120403009]

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This study demonstrates an optomechanical nanofilm resonator for highly sensitive hydrogen detection, utilizing Pd and Au-decorated graphene. The resonator shows a low detection limit and a shift in mechanical resonance frequencies in response to increasing hydrogen concentrations.
Nanofilm resonators combine ultracompact and highly mechanically sensitive properties, making them intriguing devices for sensing applications. For trace hydrogen detection, we demonstrate an optomechanical nanofilm resonator by employing a Pd- and Au-decorated graphene onto a fiber end facet. The Pd layer is a sensitive layer for selective absorption of hydrogen. Hydrogen sensing is achieved by all-optical measuring of the resonant frequencies shift of the optomechanical nanofilm resonator induced by hydrogen-related mechanical stress change. Using the approach, we realize highly sensitive hydrogen sensing at room temperature with a low detection limit, challenging the state-of-the-art. When the measured hydrogen concentration increases from 0 to 1000 ppm (v/v), the mechanical resonance frequencies of the sensor at 511.7 kHz, 1253.4 kHz, and 2231.7 kHz blue-shift by 100.4 kHz, 257.5 kHz, and 400.6 kHz, respectively. The response and recovery time are 120.3 and 91.3 sat a 1000 ppm hydrogen concentration. Such a sensor exhibits a low detection limit of 741 ppb and good repeatability in the measurement process, which makes the practical application of the sensor possible.

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