Journal
FRONTIERS OF OPTOELECTRONICS
Volume 15, Issue 1, Pages -Publisher
HIGHER EDUCATION PRESS
DOI: 10.1007/s12200-022-00012-9
Keywords
Thermo-optic phase shifter; Photonic integrated circuits (PICs); Optical switches; Silicon photonics
Categories
Funding
- Chuan-Yu Cooperation Project [Cstc2020jscx-cy1hX0006]
- Chongqing Science and Technology Commission of China [cstc2020jscx-msxm0099, cstc2020jscx-msxm0100]
- Chongqing Natural Science Foundation of China [cstc2020jcyj-msxm3725]
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Silicon photonic platforms have significant importance in various applications and therm-optic phase shifters play a crucial role. To achieve better performance and lower costs, TOPS with various merits are needed. Different types of TOPS have been proposed and experimentally demonstrated.
Silicon photonic platforms offer relevance to large markets in many applications, such as optical phased arrays, photonic neural networks, programmable photonic integrated circuits, and quantum computation devices. As one of the basic tuning devices, the thermo-optic phase shifter (TOPS) plays an important role in all these applications. A TOPS with the merits of easy fabrication, low power consumption, small thermal time constant, low insertion loss, small footprint, and low crosstalk, is needed to improve the performance and lower the cost of the above applications. To meet these demands, various TOPS have been proposed and experimentally demonstrated on different foundry platforms In this paper, we review the state-of-the-art of TOPS, including metal heater, doped silicon, silicide, with silicon substrate undercut for heat insulation, folded waveguide structure, and multi-pass waveguide structure. We further compare these TOPSs and propose the directions of the future developments on TOPS.
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