Development of Air Bearing Stage Using Flexure for Yaw Motion Compensation

This paper presents an air bearing stage that uses flexure for yaw motion compensation. The proposed stage realizes motion in three degrees of freedom (DOE), which are the X, Y, and Theta(Z) directions. To work with Theta(Z) as the rotational motion of the stage, we applied a flexure consisting of four bar linkages. The stage from a previous study in which flexure is applied to compensate for yaw motion error has the limitation of increasing the structural stiffness of the stage due to the rotational stiffness. In this study, we propose a combination of a new stage structure and flexure to ensure the high structural stiffness of the stage and the very low rotational stiffness of the flexure at the same time. Modeling and design optimization were performed to apply adequate flexure to the proposed stage. Experiments were carried out to verify yaw motion error compensation and the performance of the stage. The proposed stage has a maximum yaw motion error of 0.86 arcsec during the scanning motion and 48 ms settling time, while the stepping motion is improved by 34.2% compared to the previous study.

Automated summary

This paper presents an air bearing stage that uses flexure for yaw motion compensation. The proposed stage combines a new stage structure and flexure to achieve high structural stiffness and low rotational stiffness. Experiments were conducted to verify the performance of the stage and compensation of yaw motion error.