Atomic simulations of tip-based nanomilling on single-crystal copper

An atomic force microscopy (AFM) tip-based scratching method was used to machine 2D/3D micronanostructures. However, the machining efficiency is too low for these structures to find wide used in applications. An AFM tip-based nanomilling approach is more efficient due to the associated higher material removal rate. This paper compares the material removal mechanisms of single-scratch and nanomilling processes close to the atomic scale on a single-crystal copper surface using molecular dynamics simulations. By analyzing the groove morphology, atomic flow behavior, and the variation in scratching force, the material removal mechanism is revealed. Moreover, the effects of tip trajectory and crystallographic orientation on atomic removal are studied by analyzing the relationship between the evolution of subsurface defects and material removal. This work reveals the mechanism underlying material removal in nanomilling in detail, which will greatly improve the ability of the tip-based nanomachining method.

Automated summary

This paper compares the material removal mechanisms of single-scratch and nanomilling processes on a copper surface using molecular dynamics simulations. By analyzing the groove morphology, atomic flow behavior, and the variation in scratching force, the material removal mechanism is revealed. The effects of tip trajectory and crystallographic orientation on atomic removal are also studied. The findings provide important insights for improving the ability of tip-based nanomachining.