4.6 Article

Effect of Hydrogen Migration in SiO2/Al2O3 Stacked Gate Insulator of InGaZnO Thin-Film Transistors

Journal

CRYSTALS
Volume 12, Issue 5, Pages -

Publisher

MDPI
DOI: 10.3390/cryst12050594

Keywords

synaptic device; InGaZnO thin-film transistor; hydrogen; low-temperature atomic layer deposition; XPS

Funding

  1. National Research Foundation of Korea (NRF) - Korea Government (MSIT) [2016R1A5A1012966, 2020R1A2B5B01001979, 2020M3F3A2A01081656]
  2. Institute of Information and Communications Technology Planning and Evaluation (IITP) - Korea government (MSIT) [2021-0-01764]
  3. Brain Korea 21 Four Program

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This paper discusses the correlation between SiO2 deposition thickness and hydrogen content, and analyzes the effect of the SiO2 layer on the properties of synaptic IGZO TFTs. The results show that the SiO2 layer improves the memory window and retention characteristics, and provides guidance for optimizing the hydrogen content.
In this work, the correlation between SiO2 deposition thickness and hydrogen content is discussed and the effect of the SiO2 layer on the properties of synaptic InGaZnO (IGZO) TFTs is analyzed. Three types of IGZO synaptic thin-film transistors (TFTs) were fabricated with different gate insulators, and the effect of SiO2 as a gate insulator was investigated. XPS analysis confirmed that the hydrogen content in the Al2O3 and SiO2 layers increased during SiO2 deposition step for all depth regions. Hydrogen injected by the SiO2 layer deposition step was confirmed to improve the memory window through more threshold voltage shift under positive bias stress (PBS) and negative bias stress (NBS) conditions. In addition, the retention characteristics were improved due to the low hydrogen movement velocity in the SiO2 layer. These results contribute to the optimization of the amount of hydrogen, and the proposed device has potential as a synaptic device capable of neuromorphic computing.

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