4.6 Article

Humidity Sensor Based on rGO-SDS Composite Film

Journal

MICROMACHINES
Volume 13, Issue 4, Pages -

Publisher

MDPI
DOI: 10.3390/mi13040504

Keywords

rGO-SDS; humidity; test; sensitivity

Funding

  1. National Natural Science Foundation of China [51935011]
  2. Innovative Research Group Project of National Science Foundation of China [51821003]
  3. Fund for Shanxi 1331 Project Key Subject Construction

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This paper investigates the humidity sensitivity of a rGO-SDS composite film humidity sensor and demonstrates its performance under different temperatures through experiments and analysis.
Based on the humidity testing requirements in different environments, this paper investigates the humidity sensitivity of reduced graphene oxide (rGO)-sodium dodecyl sulfate (SDS) composite film humidity sensor. In the experiments, rGO-SDS dispersions with a concentration of 5 mg/mL were prepared, and a microelectromechanical system (MEMS) process was used to prepare the interdigital electrodes. The dispersions were then drop-coated on the interdigital electrodes and dried on a heated plate at 100 degrees C. The surface characteristics of the rGO-SDS films transferred onto SiO2-Si substrates were analyzed by scanning electron microscopy, raman spectroscopy and atomic force microscopy, infrared spectroscopy, X-ray photoelectron spectroscopy, and tested by a correlation system, which showed a linear relationship between humidity variation and the resistance variation of the sensor in the ambient humidity range of 25-95% RH. At room temperature, the linearity of the sensor is about 0.98431 and the sensitivity is about 11.41432 omega/% RH. At 100 degrees C, the correlation of the sensor is about 0.95046 and the sensitivity is about 1.0145 omega/% RH; with a response time of only 9 s at ambient humidity from 25% RH to 95% RH, the sensor has very good repeatability and stability.

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