Journal
MICROMACHINES
Volume 13, Issue 6, Pages -Publisher
MDPI
DOI: 10.3390/mi13060870
Keywords
laser micromachining; grooves; ultrashort laser pulses; analytical model; depth progress
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Funding
- Federal Ministry for Economic Affairs and Climate Action (BMWK) [03EN4007G]
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The analytical model predicts the progress and final depth of laser micromachining of grooves in metals with ultrashort laser pulses by recursively calculating the depth increments induced by successive scans of the laser beam along the groove. Experimental validation confirms the model and its assumptions for micromachining of grooves in a Ti-alloy with femtosecond pulses and various parameters.
An analytical model is presented that allows predicting the progress and the final depth obtained by laser micromachining of grooves in metals with ultrashort laser pulses. The model assumes that micromachined grooves feature a V-shaped geometry and that the fluence absorbed along the walls is distributed with a linear increase from the edge to the tip of the groove. The depth progress of the processed groove is recursively calculated based on the depth increments induced by successive scans of the laser beam along the groove. The experimental validation confirms the model and its assumptions for micromachining of grooves in a Ti-alloy with femtosecond pulses and different pulse energies, repetition rates, scanning speeds and number of scans.
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