Design of a Capacitive MEMS Accelerometer with Softened Beams

Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerometer. The experiments show that the stiffness of the accelerometer is reduced by 43% with softened beams and the sensitivity is increased by 72.6%. As a result, the noise of the accelerometer is reduced to 26.2 mu g/root Hz with an improvement of 44.5%, and bias instability is reduced to 5.05 mu g with an enhancement of 38.7%. The electrostatic assembly-based stiffness softening technique is proven to be effective and can be used in many types of MEMS devices.

Automated summary

This paper proposes a method of lowering the stiffness of capacitive-based microelectromechanical systems (MEMS) sensors by using softened beams achieved through electrostatic assembly. The experiments demonstrate that the stiffness of the accelerometer is reduced by 43% and the sensitivity is increased by 72.6% with the softened beams. The result is a significant reduction in noise and bias instability of the accelerometer. The technique of electrostatic assembly-based stiffness softening is proven to be effective and applicable to various types of MEMS devices.