Journal
MICROMACHINES
Volume 13, Issue 4, Pages -Publisher
MDPI
DOI: 10.3390/mi13040543
Keywords
ultrafast laser direct writing; chemical etching; carbon dioxide laser processing; 3D glass microfluidics; fused silica; continuous-flow photochemical synthesis
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Funding
- National Natural Science Foundation of China [12174107, 61991444, 11933005, 11874060, 11734009]
- National Key R&D Program of China [2019YFA0705000]
- Science and Technology Commission of Shanghai Municipality [21DZ1101500]
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We have demonstrated a hybrid laser microfabrication approach that combines ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting techniques to fabricate 3D complex hollow microstructures in fused silica glass. With this approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. The manufactured chip showed high-performance on-chip mixing and continuous-flow photochemical synthesis, indicating its powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.
We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV irradiation at similar to 280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.
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