Journal
TM-TECHNISCHES MESSEN
Volume 89, Issue 5, Pages 343-351Publisher
WALTER DE GRUYTER GMBH
DOI: 10.1515/teme-2021-0118
Keywords
Thermal properties; bidirectional heat flow; thin layer; Time Domain Thermoreflectance (TDTR)
Categories
Funding
- COMET program within the K2 Center Integrated Computational Material, Process and Product Engineering (IC-MPPE) [859480]
- Austrian Federal Ministry for Climate Action, Environment, Energy, Mobility, Innovation and Technology (BMK)
- Austrian Federal Ministry for Digital and Economic Affairs (BMDW)
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The thermophysical properties of materials and heat transfer optimization are crucial for the industrial applications of micro- and nanoelectronic devices. The optical-based Time Domain Thermoreflectance (TDTR) method is used to obtain thermal properties of thin layers. The bidirectional heat flow approach extends the range of samples that can be analyzed by TDTR and enables the evaluation of materials with rough surfaces.
Thermophysical properties of materials and the optimization of the heat transfer are becoming more and more important for industrial applications of micro- and nanoelectronic devices. Thin layers in the micrometer to nanometer range are used to give specific functions to the devices. Since the thermophysical properties of thin layers differ from bulk material, this data is required for precise predictions of thermal management. One way to obtain the thermal properties of thin layers is the optical-based Time Domain Thermoreflectance (TDTR) method. To carry out TDTR measurements with a low level of uncertainty, the samples under study must meet requirements related to the surface roughness and a low level of optical scattering. The range of samples analysable by TDTR can be extended by applying the so-called bidirectional heat flow approach. This approach opens the possibility to assess thermal properties of materials with rough surfaces as well. The validity of the implemented model was shown by the characterisation of a test sample with well-known thermal properties fabricated for this purpose out of poly(methyl methacrylate) (PMMA) roughened with acetone:ethanol. The results obtained by TDTR measurements were compared to literature values, demonstrating the applicability of the bidirectional heat flow approach for this setup.
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