Flexible capacitive pressure sensors using microdome like structured polydimethylsiloxane dielectric layers

The development of reproducible flexible capacitive pressure sensors with tunable sensitivity is vital for electronic-skin applications. Herein, we propose an improved fabrication process of flexible capacitive pressure sensors by completely eliminating the lamination layer step without compromising on sensor performance. For this, a facile isotropic etching process is also developed for silicon mold with inverted microdome like structures. Flexible capacitive pressure sensors having a similar to 81 mu m thick microdome like structured PDMS dielectric layer, and with and without a lamination layer are fabricated. Sensor having no lamination layer is outperformed the sensor with a lamination layer in a wide pressure range (< 500 kPa), exhibited stable relative capacitance (Delta C/Co) up to 1000 cycles, and able to sense low pressure (similar to 55 Pa). The developed sensors are also used for in-vivo arterial pulse waveform monitoring when properly attached on wrist. The single lap shear adhesion test of sensors indicates that the sensor having no lamination layer exhibited maximum shear stress of similar to 2.7 N (before breakage) compared to the sensor with lamination layer (similar to 1.9 N). The COMSOL simulations also support our experimental findings with large Delta C/C-o in the case of sensor having no lamination layer. This study presents a novel process for facile preparation of microdome like structures and improved adhesion between different layers of flexible capacitive pressure sensors, which is important for reproducible pressure sensors. (c) 2022 Elsevier B.V. All rights reserved.

Automated summary

This study proposes an improved fabrication process for flexible capacitive pressure sensors, eliminating the lamination layer step to enhance sensor performance. A facile isotropic etching process and mechanical structure with microdome-like features are developed. Experimental results demonstrate that sensors without a lamination layer outperform those with a lamination layer, exhibiting stable relative capacitance and the ability to sense low pressure. Adhesion tests and COMSOL simulations further support the superior performance of sensors without a lamination layer.