4.6 Article

Impact of implantation geometry and fluence on structural properties of AlxGa1-xN implanted with thulium

Related references

Note: Only part of the references are listed.
Article Materials Science, Multidisciplinary

Selective p-type Doping of GaN:Si by Mg Ion Implantation and Multicycle Rapid Thermal Annealing

Marko J. Tadjer et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2016)

Article Chemistry, Physical

Mechanisms of Implantation Damage Formation in AlxGa1-xN Compounds

D. Nd. Faye et al.

JOURNAL OF PHYSICAL CHEMISTRY C (2016)

Article Physics, Applied

Quantitative x-ray diffraction analysis of bimodal damage distributions in Tm implanted Al0.15Ga0.85N

S. Magalhaes et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2016)

Article Instruments & Instrumentation

Study of damage formation and annealing of implanted III-nitride semiconductors for optoelectronic devices

D. Nd. Faye et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2016)

Article Multidisciplinary Sciences

Improved p-type conductivity in Al-rich AlGaN using multidimensional Mg-doped superlattices

T. C. Zheng et al.

SCIENTIFIC REPORTS (2016)

Article Physics, Applied

High hole concentration in p-type AlGaN by indium-surfactant-assisted Mg-delta doping

Yingda Chen et al.

APPLIED PHYSICS LETTERS (2015)

Review Materials Science, Multidisciplinary

AlGaN devices and growth of device structures

K. A. Jones et al.

JOURNAL OF MATERIALS SCIENCE (2015)

Article Physics, Applied

High p-type conduction in high-Al content Mg-doped AlGaN

Toru Kinoshita et al.

APPLIED PHYSICS LETTERS (2013)

Article Physics, Applied

Mechanisms of Damage Formation during Rare Earth Ion Implantation in Nitride Semiconductors

Pierre Ruterana et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2013)

Article Physics, Applied

Mechanisms of damage formation in Eu-implanted AlN

S. Leclerc et al.

JOURNAL OF APPLIED PHYSICS (2012)

Article Materials Science, Multidisciplinary

It's not easy being green: Strategies for all-nitrides, all-colour solid state lighting

K. P. O'Donnell et al.

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS (2012)

Article Electrochemistry

Enhancement-Mode AlGaN/GaN HEMTs Fabricated by Standard Fluorine Ion Implantation with a Si3N4 Energy-Absorbing Layer

Hongwei Chen et al.

ELECTROCHEMICAL AND SOLID STATE LETTERS (2011)

Article Physics, Multidisciplinary

Mechanisms of damage formation in Eu-implanted GaN probed by X-ray diffraction

B. Lacroix et al.

Proceedings Paper Physics, Applied

In-Situ RBS Channelling Studies Of Ion Implanted Semiconductors And Insulators

E. Wendler

APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY: TWENTY-FIRST INTERNATIONAL CONFERENCE (2011)

Article Physics, Applied

Optical doping and damage formation in AlN by Eu implantation

K. Lorenz et al.

JOURNAL OF APPLIED PHYSICS (2010)

Article Physics, Applied

Damage and microstructure evolution in GaN under Au ion irradiation

Yanwen Zhang et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2010)

Review Physics, Multidisciplinary

X-ray diffraction of III-nitrides

M. A. Moram et al.

REPORTS ON PROGRESS IN PHYSICS (2009)

Article Materials Science, Multidisciplinary

Compositional dependence of damage buildup in Ar-ion bombarded AlGaN

K. Pagowska et al.

VACUUM (2009)

Article Materials Science, Multidisciplinary

A comparative structural investigation of GaN implanted with rare earth ions at room temperature and 500 °C

F. Gloux et al.

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY (2008)

Review Optics

Ultraviolet light-emitting diodes based on group three nitrides

Asif Khan et al.

NATURE PHOTONICS (2008)

Article Instruments & Instrumentation

Defect production in neutron irradiated GaN

J. G. Marques et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2006)

Article Physics, Applied

X-ray scattering study of hydrogen implantation in silicon

Nicolas Sousbie et al.

JOURNAL OF APPLIED PHYSICS (2006)

Article Materials Science, Multidisciplinary

High temperature annealing of rare earth implanted GaN films: Structural and optical properties

K Lorenz et al.

OPTICAL MATERIALS (2006)

Article Physics, Applied

Defect accumulation during channeled erbium implantation into GaN

B Pipeleers et al.

JOURNAL OF APPLIED PHYSICS (2005)

Article Physics, Applied

Dynamic annealing in III-nitrides under ion bombardment

SO Kucheyev et al.

JOURNAL OF APPLIED PHYSICS (2004)

Article Crystallography

Structure and photoluminescence studies of Pr-implanted GaN

SF Song et al.

JOURNAL OF CRYSTAL GROWTH (2004)

Article Materials Science, Multidisciplinary

Implantation angle dependence of ion irradiation damage in GaN

J Nord et al.

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY (2003)

Article Instruments & Instrumentation

Influence of the implantation angle on the generation of defects for Er implanted GaN

B Pipeleers et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2003)

Article Instruments & Instrumentation

Molecular dynamics study of defect formation in GaN cascades

J Nord et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2003)

Article Materials Science, Multidisciplinary

X-ray determination of the composition of partially strained group-III nitride layers using the Extended Bond Method

N Herres et al.

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY (2002)

Article Physics, Applied

Structural disorder in ion-implanted AlxGa1-xN

SO Kucheyev et al.

APPLIED PHYSICS LETTERS (2002)

Review Materials Science, Multidisciplinary

Ion implantation into GaN

SO Kucheyev et al.

MATERIALS SCIENCE & ENGINEERING R-REPORTS (2001)

Article Instruments & Instrumentation

Suppression of rare-earth implantation-induced damage in GaN

A Vantomme et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2001)