Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 31, Issue 4, Pages -Publisher
IOP Publishing Ltd
DOI: 10.1088/1361-6595/ac61a8
Keywords
RF compensation; Langmuir probe; electron energy distribution function; external filter; passive filter
Categories
Funding
- National Research Foundation of Korea [NRF2019M1A7A1A03087579, NRF2021R1I1A1A01050312]
- Ministry of Trade, Industry and Energy [20011226, 20009415]
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Measurement of electron energy distribution function (EEDF) in low-density RF plasmas is improved by development of a new external filter, reducing RF distortion and observing electron heating mode transition.
The electron energy distribution function (EEDF) measurement in radio frequency (RF) plasmas is of fundamental interests, especially in low-density RF capacitively coupled plasma. For this purpose, a new external filter with very high impedances is developed. The impedance of the filter at the fundamental and its harmonic frequencies (13.56, 27.12 and 40.68 MHz) through careful circuit design is maximized. Experimental verifications are performed by measuring the EEDFs in RF discharges. The result shows that the RF distortion in the EEDF measurement is significantly reduced by tuning the filter under various discharge conditions in an inductively coupled plasma. Accurate plasma densities can be obtained and the electron heating mode transition is observed through high-quality EEDF measurement in an capacitively coupled plasma, where RF plasma potential fluctuates severely.
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