Journal
PHYSICAL REVIEW LETTERS
Volume 128, Issue 22, Pages -Publisher
AMER PHYSICAL SOC
DOI: 10.1103/PhysRevLett.128.226102
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Funding
- National Key Research and Development Program of China [2018YFA0208600]
- National Science Foundation of China [12188101, 22022301, 21773032, 21972023, 21533001, 91545107, 91745201]
- Tencent Foundation
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By using a machine-learning-based global search method, researchers have identified two promising Si/SiO2 interface structures for next-generation transistors.
While the downscaling of size for field effect transistors is highly desirable for computation efficiency, quantum tunneling at the Si/SiO2 interface becomes the leading concern when approaching the nanometer scale. By developing a machine-learning-based global search method, we now reveal all the likely Si/SiO2 interface structures from thousands of candidates. Two high Miller index Si(210) and (211) interfaces, being only -1 nm in periodicity, are found to possess good carrier mobility, low carrier trapping, and low interfacial energy. The results provide the basis for fabricating stepped Si surfaces for next-generation transistors.
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