4.7 Article

Additive and subtractive manufacturing of gold micro/nanostructures by using laser trapping and ablation

Journal

OPTICS AND LASERS IN ENGINEERING
Volume 152, Issue -, Pages -

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.optlaseng.2022.106959

Keywords

Hybrid manufacturing technology; Gold micro; nanostructures; Laser trapping; Laser ablation

Categories

Funding

  1. National Key Research and Develop-ment Program of China [2016YFA0200502]
  2. National Natural Science Foundation of China (NSFC) [61405196]

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This research utilized laser trapping of gold nanoparticles in an aqueous solution to fabricate gold micro/nanostructures, achieving a high spatial resolution. A new additive and subtractive hybrid manufacturing technology was proposed and realized to improve the spatial resolution of the fabricated structures. The technology has great application prospects in the fabrication of high spatial resolution nanostructures, with a gold microring of line width 37 nm successfully fabricated through precise control of fabrication parameters.
Gold micro/nanostructures were additively manufactured by using laser trapping of gold nanoparticles in an aqueous solution. Gold wire composed of sintered compacted nanoparticles with spatial resolution of 470 nm was fabricated. Influence factors for wire fabrications were also studied systematically. In order to investigate the fabrication capacity of this technology for three-dimensional structures, several microstructures were fabricated. A new additive and subtractive hybrid manufacturing technology by using laser trapping and ablation was proposed and realized to further improve the spatial resolution of the fabricated structures. A gold microring with line width of 37 nm was fabricated through precisely controlling fabrication parameters. This hybrid manufacturing technology has great application prospects in the fabrication of high spatial resolution nanostructures.

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