4.6 Article

Efficient and accurate atomistic modeling of dopant migration using deep neural network

Journal

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2022.106513

Keywords

Deep neural network; Nudged elastic band; Ab-initio TCAD; Dopant; Density functional theory

Funding

  1. National Natural Science Foundation of China [62104067, 61804049]
  2. Fundamental Research Funds for the Central Universities of P.R. China
  3. Huxiang High Level Talent Gathering Project [2019RS1023]
  4. Key Research and Development Project of Hunan Province, P.R. China [2019GK2071]
  5. Technology Innovation and Entrepreneurship Funds of Hunan Province, P.R. China [2019GK5029]
  6. Fund for Distinguished Young Scholars of Changsha [kq1905012]
  7. China Postdoctoral Science Foundation [2020M682552]

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This paper proposes an efficient method using deep neural networks to model atomistic dopant migration, showing high accuracy and speed compared to traditional DFT-based methods through NEB simulations.
This paper proposes an efficient and accurate method to model atomistic dopant migration, by leveraging the emerging deep neural network (DNN). By performing nudged elastic band (NEB) simulations of three prototype systems (B-doped Si, Li-doped Si, and C-doped GaN), it is shown that the proposed DNN-based method runs about 10(4)-10(5) times faster than the widely-used atomistic dopant migration modeling method based on density functional theory (DFT), meanwhile keeping DFT-level high accuracy. Active learning is used to reduce training set redundancy, and the DNN model is further optimized for more accurate NEB calculation. As a result, the dopant atomic position in saddle-point and the dopant migration energy barrier in the migration energy path (MEP) predicted by the proposed DNN-based NEB deviate merely about 10(-2) angstrom and 10(-2) eV, respectively, from those predicted by the established DFT-based NEB. Given its efficiency and accuracy, the proposed DNN-based method might be useful to develop future-generation atomic-scale technology computer-aided design (TCAD) tools.

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