4.6 Article

Influence of single diamond wire sawing of photovoltaic monocrystalline silicon on the feed force, surface roughness and micro-crack depth

Journal

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2022.106525

Keywords

Diamond wire; Continuous sawing; Surface quality; Micro-crack formation; Silicon wafer

Funding

  1. Brazilian governmental agencies CAPES
  2. CNPq

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In this study, experiments with a single diamond wire loop were conducted to investigate the influence of diamond wire sawing on monocrystalline silicon's feed force and wafer quality. The results showed that higher feed rates and wire tensions increased the feed force, while higher cutting speeds reduced it. Surface roughness was more affected by feed rate and cutting speed, while micro-crack depth was less influenced. A combination of lower feed rate, lower wire tension, and higher cutting speed resulted in lower feed force, smoother surface, and shallower micro-crack depth.
To gain an in-depth understanding of the influence of diamond wire sawing of monocrystalline silicon on the feed force and wafer quality, experiments with a single diamond wire in the form of a loop were performed. The cutting parameters of wire cutting speed, feed rate and wire tension were varied. The feed force was monitored and surface roughness of the specimen was measured. The micro-crack depth was determined using an image processing. The results show that cutting conditions of higher feed rate and higher wire tension increased the feed force by 78% and 20%, respectively, since for chip removal these conditions is required a higher force per grain. On increasing the wire cutting speed, the feed force reduced by 66% due to a decrease in penetration depth of the grains. Based on an analytical model, it was evidenced that volume of material removed per wire length has a significant effect on feed force. The variation of the feed rate and wire cutting speed had a greater effect on surface roughness R-a and R-q, with a minor effect on R-z. With a higher feed rate the micro-crack depth increased, whereas it was reduced on increasing the wire cutting speed. A strong correlation between sawn surface and subsurface damage was found, indicating that the micro-crack depth is around 1.37 times higher than R-z value. The combination of a lower feed rate and lower wire tension with higher wire cutting speed resulted in lower feed force, smoother surface and shallower micro-crack depth.

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