4.6 Article

Ultrasensitive fully transparent amorphous Ga2O3 solar-blind deep-ultraviolet photodetector for corona discharge detection

Journal

JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 55, Issue 30, Pages -

Publisher

IOP Publishing Ltd
DOI: 10.1088/1361-6463/ac6d26

Keywords

corona discharge; solar-blind photodetector; Ga2O3; fully transparent; ultrasensitive

Funding

  1. National Natural Science Foundation of China [11904041, 12104077]
  2. Science and Technology Research Project of Chongqing Education Committee [KJQN201900542, KJQN202000511, KJQN202100540, KJQN201800501]
  3. Natural Science Foundation of Chongqing [cstc2020jcyj-msxmX0557, cstc2020jcyj-msxmX0533, cstc2019jcyj-msxmX0237]

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In this study, a fully transparent metal-semiconductor-metal solar-blind photodetector with excellent performance was successfully constructed using amorphous Ga2O3 film and Al-doped ZnO transparent electrodes. The detector exhibits ultra-low dark current, high photo-to-dark current ratio, superb rejection ratio, large responsivity, superb detectivity, and fast response speed. It demonstrates ultra-high sensitivity to weak solar-blind signals and can be used for high-voltage corona discharge detection.
Solar-blind deep-ultraviolet photodetectors are one of the most effective tools to detect corona discharge because high-voltage corona discharge is always accompanied by deep-ultraviolet light (UVC, 200-280 nm), referred to as solar-blind signals. In this study, a fully transparent metal-semiconductor-metal solar-blind photodetector with Al-doped ZnO (AZO) transparent electrodes was successfully constructed based on amorphous Ga2O3 film (a-Ga2O3) and prepared by radio frequency magnetron sputtering. The as-fabricated fully transparent device exhibits excellent performance, including an ultra-low dark current of 2.84 pA, a high photo-to-dark current ratio of 1.41 x 10(7), superb rejection ratio (R-254/R-400 = 2.93 x 10(5)), a large responsivity of 2.66 A W-1, superb detectivity (4.84 x 10(14) Jones), and fast response speed (rise/fall time: 24 mu s/1.24 ms). It is worth noting that the fully transparent a-Ga2O3 photodetector demonstrates ultra-high sensitivity to weak solar-blind signals, far below the 100 nW cm(-2) threshold of the test equipment. It also has high-resolution detection capabilities for subtle changes in radiation intensity. Acting as a sensor for the high-voltage corona discharge simulation detection system, the fully transparent a-Ga2O3 photodetector can clearly detect extremely weak solar-blind signals. The results described in this work serve as proof-of-concept for future applications of amorphous Ga2O3 solar-blind deep-ultraviolet photodetectors in high-voltage corona discharge detection.

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