4.6 Article

High-Frequency Self-Focusing Ultrasonic Transducer With Piezoelectric Metamaterial

Journal

IEEE ELECTRON DEVICE LETTERS
Volume 43, Issue 6, Pages 946-949

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2022.3170613

Keywords

High-frequency; broadband; ultrasonic transducer; self-focusing; gradient metamaterial

Funding

  1. National Natural Science Foundations of China [61974110]
  2. Key Projects of National Defense Basic Research Program of National Defense Science and Industry Administration [JCKY2019210B003]
  3. Natural Science Foundations of Shaanxi Province [2020JM-205]
  4. Shaanxi Provincial Association of Science and Technology Young Talents Support Project [20190105]
  5. Fundamental Research Funds for the Central Universities [XJS211105, JBF211103]

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An active gradient metamaterial (AGM) based on composite structure on traditional piezoelectric materials is proposed to achieve the acoustic impedance matching and underwater acoustic focusing. The active self-focusing and broadband focusing behaviors of the AGM are demonstrated through simulation and experimental results.
Focused ultrasonic waves are widely used in medical imaging, fibroids ablation and acoustic tweezers due to its high sensitivity and large energy at the focal spot. Although, acoustic metamaterials have emerged for acoustic focusing, they have limited to low frequency, narrowband and less acoustic transmission. Herein, an active gradient metamaterial (AGM) based on composite structure on traditional piezoelectric materials is proposed to achieve the acoustic impedance matching and underwater acoustic focusing. Based on the principle that the acoustic wave emitted from the piezoelectric plate reaches the focal spot at the same time, an aperiodic axisymmetric composite with gradient depth is established. A 200 mu m kerf is selected, and the depth ranges from 44 mu m to 146 mu m. The acoustic field pressure intensity is simulated with finite element software, and measured by a needle hydrophone with fabricated transducer. Based on the good agreement between the simulation and experimental results with the excitation frequency range of 4 MHz-20 MHz, the active self-focusing and broadband focusing behaviors of the AGM are demonstrated. It is expected to apply the proposed acoustic metamaterial in biomedical and industrial applications.

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