4.5 Article

Room-temperature single-electron tunneling in highly-doped silicon-on-insulator nanoscale field-effect transistors

Journal

APPLIED PHYSICS EXPRESS
Volume 15, Issue 6, Pages -

Publisher

IOP Publishing Ltd
DOI: 10.35848/1882-0786/ac68cf

Keywords

single-electron tunneling; nano-transistor; donor cluster; quantum dot

Funding

  1. JSPS KAKENHI [19K04529]
  2. JST CREST [JPMJCR1774]
  3. Cooperative Research Project of Research Institute of Electronics, Shizuoka University
  4. Grants-in-Aid for Scientific Research [19K04529] Funding Source: KAKEN

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In this study, a comparative analysis was conducted on nano-scale silicon-on-insulator transistors with phosphorus-doped channels under two different doping concentrations. It was found that devices with higher dopant concentrations can achieve single-electron tunneling operation at room temperature, while devices with lower concentrations are limited to around 100K. Numerical simulations showed that donor clustering plays a dominant role in the formation of quantum dots, with clusters consisting of more than three donors responsible for room-temperature operation.
From the viewpoint of high- (room-) temperature operation of donor-based single-electron transistors, we make a comparative study of nano-scale silicon-on-insulator transistors with phosphorus-doped channels for two dopant-concentration regimes: N (D) approximate to 1 x 10(18) and 2 x 10(20 )cm(-3). We experimentally show that the high-N (D) devices can provide room-temperature single-electron tunneling operation owing to a large tunnel-barrier height, while operation temperature is limited to about 100 K for the low-N (D) devices. Numerical simulations of random donor-atom distributions indicate that donor clustering plays a dominant role in the formation of quantum dots, and suggests that clusters comprising of more-than-three donors are responsible for room-temperature operation.

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