Journal
APPLIED OPTICS
Volume 61, Issue 13, Pages 3850-3854Publisher
Optica Publishing Group
DOI: 10.1364/AO.456427
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Funding
- European Research Council [ERC-2012-StG 310005]
- Schweizerischer Nationalfonds zur Forderung der Wissenschaftlichen Forschung [159263, 206021_189662, CRSII2_154472, CRSII5_183568]
- Staatssekretariat fur Bildung, Forschung und Innovation (SERI-AM-TTC)
- Fondazione Gelu
- Kanton Aargau (SwissLOS Fond of the Kanton Aargau)
- Swiss National Science Foundation (SNF) [206021_189662, CRSII5_183568, CRSII2_154472] Funding Source: Swiss National Science Foundation (SNF)
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This study proposes a device with a fractal pattern for precise automatic focusing in high-resolution X-ray tomography. The device generates X-ray transmission images with globally homogeneous macroscopic visibility and high local contrast, and can be used for different pixel sizes and X-ray energies.
Precisely aligned optical components are crucial prerequisites for X-ray tomography at high resolution. We propose a device with a fractal pattern for precise automatic focusing. The device is etched in a Si substrate by deep reactive ion etching and then filled by a self-terminating bottom-up Au electroplating process. The fractal nature of the device produces an X-ray transmission image with globally homogeneous macroscopic visibility and high local contrast for pixel sizes in the range of 0.165 mu m to 11 mu m, while the high absorption contrast provided between Au and Si enables its use for X-ray energies ranging from 12 keV to 40 keV. (C) 2022 Optica Publishing Group
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