Journal
ADVANCED MATERIALS
Volume 34, Issue 23, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.202201169
Keywords
gallium nitride; 4H-silicon carbide; heterogeneous epitaxy; hybrid field-effect transistors; off-axis substrates
Categories
Funding
- Shenzhen Science and Technology Innovation Committee [JCYJ20170818113423666]
- Hong Kong Research Impact Fund [R6008-18]
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This work presents a hybrid field-effect transistor (HyFET) using GaN and SiC semiconductors and proposes a methodology for improving epitaxy techniques. The researchers successfully grown high-quality heterostructure on a conventional surface and also studied a two-step biaxial strain-relaxation process.
A hybrid field-effect transistor (HyFET), superior for power electronic applications, can be created by harnessing the merits of two representative wide-bandgap semiconductors, gallium nitride (GaN) and silicon carbide (SiC). Yet, the incompactness in the epitaxy techniques hinders the development of the HyFET-GaN is usually grown on on-axis foreign substrates including SiC, whereas SiC homoepitaxy prefers off-axis substrates. This work presents a GaN-based heterostructure epitaxially grown on a conventional 4 degrees off-axis 4H-SiC substrate, which manifests its high quality and suitability for constructing GaN-based high-electron-mobility transistors, thereby suggesting a practical approach to realizing HyFETs. In the meanwhile, a distinct two-step biaxial strain-relaxation process is proposed and studied with comprehensive characterizations.
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