4.8 Article

Surface Engineering on Polyimide-Silver Films in Low-Cost, Flexible Humidity Sensors

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 14, Issue 14, Pages 16621-16630

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.2c00503

Keywords

low cost; wireless humidity sensor; surface engineering; flexible electronics; polyimide

Funding

  1. National key Research and Development program of China [2021YFE0117100]
  2. National Natural Science Foundation of China [51371129, 11174226]

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This study focuses on the application of surface engineering to fabricate low-cost Ag/PI wireless humidity sensors with a resonant frequency of 2.45 GHz. The sensors are obtained through in situ metallization technique coupled with inkjet printing, with PI playing multiple roles as a flexible substrate, ionexchange surface, and sensing material to moisture. By loading different ions on the PI surface to improve hydrophilicity, the humidity sensitivity is enhanced. The wireless humidity sensor loaded with K+ ions shows the maximum sensitivity at both low and high relative humidity ranges. The sensor also demonstrates excellent mechanical performance and stability, making it suitable for real-time humidity monitoring in automated industry and healthcare.
In this work, surface engineering is applied to polyimide (PI) films to fabricate low-cost Ag/PI wireless humidity sensors with a resonant frequency of 2.45 GHz. The sensors were obtained by in situ metallization technique coupled with inkjet printing, where PI plays triple roles as a flexible substrate, ionexchange surface, and sensing material to moisture. Moreover, the humidity sensitivity can be enhanced by the improvement of hydrophilicity via loading with different ions on the PI surface, which has been demonstrated by Fourier transform infrared (FTIR), X-ray photoelectron spectroscopy (XPS), and contact angle measurements. The wireless humidity sensor loaded with K+ ions has the maximum sensitivity of 97.7 kHz/% RH at a low relative humidity range of 20-65% and 359.7 kHz/% RH at a high relative humidity of 65-90%, respectively. Accordingly, a sensing mechanism of the fabricated humidity sensor has been discussed in detail. On the other hand, the characteristics of the humidity sensor such as response and recovery speed and stability are analyzed. The mechanical performance tests show that the humidity sensor displays excellent flexibility and good mechanical stability. A strong adhesion between the Ag antenna and PI substrate can be found as well. The passive wireless humidity sensor described in this work has the advantages of having a simple structure, low cost, high sensitivity, long-term stability, and good mechanical properties, which has potential applications in automated industry and healthcare with real-time humidity monitoring.

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