4.8 Article

Effect of the Substrate on MoS2 Monolayer Morphology: An Integrated Computational and Experimental Study

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 14, Issue 16, Pages 18835-18844

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.2c03471

Keywords

KEYWORDS; 2D materials; substrate e ff ect; molecular dynamics; synthesis; chemical vapor deposition

Funding

  1. DoE-ARPA-E OPEN [DE-AR0001066]
  2. National Science Foundation 2D Crystal Consortium - Material Innovation Platform (2DCC-MIP) under NSF [DMR-1539916]
  3. NSF-CAREER under NSF [CBET-2042683]
  4. NEWLIMITS, a center in nCORE as part of the Semiconductor Research Corporation (SRC) - NIST [70NANB17H041]

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Controlling the lattice orientation of two-dimensional materials is a major challenge for their industrial applications. This study investigates the role of substrate crystallinity in the growth orientation of 2D materials and provides insights for the high-quality synthesis of transition metal dichalcogenides (TMDs) for high-performance electronic and optoelectronic devices.
Synthesis of two-dimensional materials, specifically transition metal dichalcogenides (TMDs), with controlled lattice orientations is a major barrier to their industrial applications. Controlling the orientation of as-grown TMDs is critical for preventing the formation of grain boundaries, thus reaching their maximum mechanical and optoelectronic performance. Here, we investigated the role of the substrate's crystallinity in the growth orientation of 2D materials using reactive molecular dynamics (MD) simulations and verified with experimental growth using the chemical vapor deposition (CVD) technique. We considered MoS2 as our model material and investigated its growth on crystalline and amorphous silica and sapphire substrates. We revealed the role of the substrate's energy landscape on the orientation of as-grown TMDs, where the presence of monolayer-substrate energy barriers perpendicular to the streamlines hinder the detachment of precursor nuclei from the substrate. We show that MoS2 monolayers with controlled orientations could not be grown on the SiO2 substrate and revealed that amorphization of the substrate changes the intensity and equilibrium distance of monolayer-substrate interactions. Our simulations indicate that 0 degrees rotated MoS2 is the most favorable configuration on a sapphire substrate, consistent with our experimental results. The experimentally validated computational results and insight presented in this study pave the way for the high-quality synthesis of TMDs for high-performance electronic and optoelectronic devices.

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