3.8 Article

Ferroelectricity in CMOS-Compatible Hafnium Oxides Reviving the ferroelectric field-effect transistor technology

Journal

IEEE NANOTECHNOLOGY MAGAZINE
Volume 15, Issue 5, Pages 20-32

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/MNANO.2021.3098218

Keywords

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Funding

  1. Applications and Systems-Driven Center for Energy-Efficient Integrated NanoTechnologies
  2. one of six centers in the Joint University Microelectronics Program
  3. DARPA

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