Tin Oxide Nanosheets on Microelectromechanical System Devices for Improved Gas Discrimination

A thin film consisting of SnO2 nanosheets was synthesized as a sensing material for microelectromechanical system devices. These SnO2 nanosheets exhibited superior sensing of biomarker gases in addition to specificity, since the nanosheets were mainly exposed to the (101) crystal facet. The analysis of sensor characteristics showed that hydrogen, acetone, isoprene, and toluene were more separated after the introduction of the SnO2 nanosheets, which showed the specificity of the sensor. This indicated that with the SnO2 nanosheets as the sensing element, the gas species could be clearly distinguished while still retaining the originality of the data. This miniaturized gas sensor can contribute to the realization of convenient health monitoring in everyday life by combining wearable technology with mobility.

Automated summary

A thin film of SnO2 nanosheets was synthesized for MEMS devices as a sensing material, showing superior sensitivity and specificity for biomarker gases. The introduction of SnO2 nanosheets led to better separation of gases, indicating the potential for clear distinction of gas species and convenient health monitoring.