Journal
SURFACES AND INTERFACES
Volume 26, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.surfin.2021.101397
Keywords
Gas cluster ions; GCIB; Surface treatment; Molecular dynamics
Categories
Funding
- Russian Science Foundation [21-19-00310, 20-72-10118]
- Russian Science Foundation [20-72-10118, 21-19-00310] Funding Source: Russian Science Foundation
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The study investigated the impact of noble gas cluster species on the interaction between cluster and solid surfaces. It was found that lighter cluster front atoms experience more backscattering from surface atoms, leading to more intense multiple collisions between cluster atoms. This has implications for cluster penetration, energy exchange, and thermalization.
The effect of noble gas cluster species on the cluster interaction with solid surfaces was investigated. Processes of Ar, Kr and Xe clusters interaction with Cu and Mo surfaces were studied using molecular dynamics simulations. It is shown that lighter cluster front atoms undergo more backscattering from surface atoms, causing more intense multiple collisions between cluster atoms. This affects cluster penetration, energy exchange between the cluster and surface atoms, and cluster thermalization. The influence of energy per cluster atom on these effects is discussed.
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