Journal
NATURE ELECTRONICS
Volume 4, Issue 12, Pages 914-920Publisher
NATURE PORTFOLIO
DOI: 10.1038/s41928-021-00688-5
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Funding
- Swedish Research Council [2016-06186]
- Swedish Research Council [2016-06186] Funding Source: Swedish Research Council
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By integrating a vertical transistor and resistive memory on silicon, a compact cell capable of Boolean logic operations can be created.
In-memory computing can be used to overcome the von Neumann bottleneck-the need to shuffle data between separate memory and computational units-and help improve computing performance. Co-integrated vertical transistor selectors (1T) and resistive memory elements (1R) in a 1T1R configuration offer advantages of scalability, speed and energy efficiency in current mass storage applications, and such 1T1R cells could also be potentially used for in-memory computation architectures. Here we show that a vertical transistor and resistive memory can be integrated onto a single vertical indium arsenide nanowire on silicon. The approach relies on an interface between the III-V semiconductor nanowire and a high-kappa dielectric (hafnium oxide), which provides an oxide layer that can operate either as a vertical transistor selector or a high-performance resistive memory. The resulting 1T1R cells allow Boolean logic operations to be implemented in a single vertical nanowire with a minimal area footprint. A vertical transistor and resistive memory can be integrated on a single vertical III-V semiconductor nanowire on silicon, creating a compact cell capable of Boolean logic operations.
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