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Peculiarities of the Acoustic Wave Propagation in Diamond-Based Multilayer Piezoelectric Structures as Me1/(Al,Sc)N/Me2/(100) Diamond/Me3 and Me1/AlN/Me2/(100) Diamond/Me3 under Metal Thin-Film Deposition

ELECTRONICS (2022)

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Peculiarities of the Acoustic Wave Propagation in Diamond-Based Multilayer Piezoelectric Structures as Me1/(Al,Sc)N/Me2/(100) Diamond/Me3 and Me1/AlN/Me2/(100) Diamond/Me3 under Metal Thin-Film Deposition

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