4.6 Article

Tantalum-Titanium Oxynitride Thin Films Deposited by DC Reactive Magnetron Co-Sputtering: Mechanical, Optical, and Electrical Characterization

Related references

Note: Only part of the references are listed.
Article Materials Science, Coatings & Films

Effect of target poisoning ratios on the fabrication of titanium oxide coatings using superimposed high power impulse and medium frequency magnetron sputtering

Bih-Show Lou et al.

Summary: Five titanium oxide coatings with varying O/Ti ratios were grown using a plasma monitoring feedback control system. The hardness decreased gradually as the structure transitioned from a pure TiO phase to a mixture of rutile and anatase phases. Among the coatings, TB70 exhibited the best overall performance with good hardness, wear resistance, adhesion, and corrosion resistance.

SURFACE & COATINGS TECHNOLOGY (2021)

Article Materials Science, Multidisciplinary

Room temperature sputtered titanium oxynitride thin films: The influence of oxygen addition

Phalakorn Khwansungnoen et al.

THIN SOLID FILMS (2020)

Article Chemistry, Multidisciplinary

Tantalum Oxynitride Thin Films: Assessment of the Photocatalytic Efficiency and Antimicrobial Capacity

Daniel Cristea et al.

NANOMATERIALS (2019)

Review Chemistry, Inorganic & Nuclear

Review of functional titanium oxides. I: TiO2 and its modifications

Nazanin Rahimi et al.

PROGRESS IN SOLID STATE CHEMISTRY (2016)

Review Materials Science, Ceramics

Wear resistance investigation of titanium nitride-based coatings

Eleonora Santecchia et al.

CERAMICS INTERNATIONAL (2015)

Article Materials Science, Coatings & Films

Investigation of nanostructured transparent conductive films grown by rotational-sequential-sputtering

Jong-Hong Lu et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2014)

Article Materials Science, Coatings & Films

Tantalum oxynitride thin films: Mechanical properties and wear behavior dependence on growth conditions

D. Cristea et al.

SURFACE & COATINGS TECHNOLOGY (2014)

Article Materials Science, Multidisciplinary

Structure refinement for tantalum nitrides nanocrystals with various morphologies

Lianyun Liu et al.

MATERIALS RESEARCH BULLETIN (2012)

Article Materials Science, Multidisciplinary

Indentation size effect in nanohardness

Yu. V. Milman et al.

ACTA MATERIALIA (2011)

Article Chemistry, Physical

Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering

A. X. Wei et al.

JOURNAL OF ALLOYS AND COMPOUNDS (2011)

Article Materials Science, Coatings & Films

Properties of pulsed reactive DC magnetron sputtered tantalum oxide (Ta2O5) thin films for photocatalysis

K. Jagadeesh Kumar et al.

SURFACE & COATINGS TECHNOLOGY (2011)

Article Materials Science, Coatings & Films

Biomedical response of tantalum oxide films deposited by DC reactive unbalanced magnetron sputtering

W. M. Yang et al.

SURFACE & COATINGS TECHNOLOGY (2007)

Article Materials Science, Coatings & Films

Pulsed DC magnetron sputtered tantalum nitride hard coatings for tribological applications

Aditya Aryasomayajula et al.

SURFACE & COATINGS TECHNOLOGY (2006)

Article Spectroscopy

Accurate calculation of pileup effects in PIXE spectra from first principles

N. P. Barradas et al.

X-RAY SPECTROMETRY (2006)

Article Materials Science, Multidisciplinary

Deposition of tantalum nitride thin films by DC magnetron sputtering

SK Kim et al.

THIN SOLID FILMS (2005)

Article Materials Science, Multidisciplinary

Stable and metastable structures of the multiphase tantalum nitride system

C Stampfl et al.

PHYSICAL REVIEW B (2005)

Article Instruments & Instrumentation

Double scattering in RBS analysis of PtSi thin films on Si

NP Barradas et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2005)

Article Materials Science, Multidisciplinary

Structural, optical and mechanical properties of coloured TiNxOy thin films

F Vaz et al.

THIN SOLID FILMS (2004)