4.2 Article

Beamline commissioning for microscopic measurements with ultraviolet and soft X-ray beam at the upgraded beamline BL-13B of the Photon Factory

Journal

JOURNAL OF SYNCHROTRON RADIATION
Volume 29, Issue -, Pages 400-408

Publisher

INT UNION CRYSTALLOGRAPHY
DOI: 10.1107/S160057752200090X

Keywords

VUV-SX beamline; microscopic measurement; X-ray photoelectron spectroscopy; X-ray absorption spectroscopy; angle-resolved photoelectron spectroscopy

Funding

  1. Institute of Materials Structure Science, KEK
  2. JSPS [16H03867, 17H05212, 21H01805]
  3. TIA-Kakehashi grants [TK18014, TK19-035]
  4. Grants-in-Aid for Scientific Research [17H05212, 16H03867, 21H01805] Funding Source: KAKEN

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Beamline 13 of the Photon Factory, which has been operating since 2010, is used for vacuum ultraviolet and soft X-ray experiments. The recent upgrades allow for microscopic measurements, with improved beam performance and focusing. The use of an advanced planar polarized light emitter II undulator and a renewed toroidal post-mirror enhance the capabilities of the beamline.
Beamline 13 of the Photon Factory has been in operation since 2010 as a vacuum ultraviolet and soft X-ray undulator beamline for X-ray photoelectron spectroscopy (XPS), X-ray absorption spectroscopy (XAS), and angle-resolved photoelectron spectroscopy (ARPES) experiments. The beamline and the end-station at branch B have been recently upgraded, enabling microscopic XPS, XAS, and ARPES measurements to be performed. In 2015, a planar undulator insertion device was replaced with an APPLE-II (advanced planar polarized light emitter II) undulator. This replacement allows use of linear, circular, and elliptical polarized light between 48 and 2000 eV with photon intensities of 10(9)-10(13) photons s(-1). For microscopic measurements, a toroidal post-mirror was renewed to have more focused beam with profile sizes of 78 mu m (horizontal) x 15 mu m (vertical) and 84 mu m x 11 mu m at photon energies of 100 and 400 eV, respectively. A high-precision sample manipulator composed of an XYZ translator, a rotary feed-through, and a newly developed goniometer, which is essential for microscopic measurements, has been used to control a sample specimen in six degrees of freedom, i.e. translation in the X, Y, and Z directions and rotation in the polar, azimuthal, and tilt directions. To demonstrate the performance of the focused beams, one- and two-dimensional XPS and XAS scan measurements of a copper grid have been performed. It was indicated from analysis of XPS and XAS intensity maps that the actual spatial resolution can be determined by the beam size.

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