4.6 Article

Hierarchically Structured Flexible Electrode on Polyimide for Highly Sensitive and Reliable Biosignal Acquisition

Journal

IEEE ACCESS
Volume 10, Issue -, Pages 19710-19719

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/ACCESS.2022.3152533

Keywords

Electrodes; Gold; Sensitivity; Glucose; Fabrication; Silicon; Sensors; Flexible electrode; hierarchical structure; biopotential measurement; glucose sensor; wearable sensor; sensitivity enhancement

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In this study, hierarchically structured flexible electrodes (HSFE-PI) were fabricated on polyimide substrate using micro-casting technique and gold nanoparticles electrodeposition. The HSFE-PI was applied for electromyogram and glucose sensing applications, resulting in high sensitivity enhancement.
Numerous wearable biomedical devices are developed for the continuous monitoring of personal health or condition. Biosignals acquisition with high sensitivity is important for designing wearable biomedical devices. A sensing electrode between the human body and wearable electronics significantly affects the sensitivity of the sensors. In this study, we fabricated hierarchically structured flexible electrodes on polyimide substrate (HSFE-PI) using micro-casting technique and gold nanoparticles electrodeposition. Polyimides provides robust and outstanding electrical characteristics, and the reliability of HSFE-PI was verified with a cyclic bending test. The integration of hierarchical structures significantly increased the surface area of the electrode by 2.06 times. We applied the HSFE-PI for electromyogram (EMG) and glucose sensing applications and achieved high sensitivity enhancement in both applications. The signal-to-noise ratio (SNR) of measured EMG signals was increased by 2.48 times, and the sensitivity of the glucose detection was increased by 1.42 times compared to the planar counterpart.

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