4.6 Article

Comprehensive Study and Optimization of Implementing p-NiO in beta-Ga2O3 Based Diodes via TCAD Simulation

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Summary: This paper presents high-performance beta-Ga2O3 hetero-junction barrier Schottky (HJBS) diodes with p-type NiOx, achieving low on-resistance, high breakdown voltage, and a high DC figure of merit while minimizing reverse leakage current by shrinking the width of beta-Ga2O3. The incorporation of p-type NiOx enhances the sidewall depletion effect in beta-Ga2O3 HJBS diodes, making them an effective route for Ga2O3 power device technology with high PFOM and reduced reverse leakage current.

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