Journal
APPLIED SCIENCES-BASEL
Volume 12, Issue 3, Pages -Publisher
MDPI
DOI: 10.3390/app12030948
Keywords
laser-assisted etching; femtosecond laser micromachining; alumino-borosilicate glass
Categories
Funding
- Italian Ministry of University and Research (PRIN 2017 progamme, QUSHIP project) [2017SRNBRK]
- EU [801336]
- European Research Council (ERC) under the European Union [742745]
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Femtosecond laser micromachining is an established technique for fabricating complex three-dimensional structures in glass. The combination of laser writing and chemical etching allows for the fabrication of hollow structures and the integration of optical and fluidic components in a single substrate, enabling the development of optofluidic devices for various applications.
Femtosecond laser micromachining is becoming an established technique for the fabrication of complex three-dimensional structures in glass. The combination of laser writing and chemical etching increases the technique versatility by allowing the fabrication of hollow structures within the bulk material. The possibility to encompass both optical and fluidic components in a single substrate allows us to realize optofluidic devices usable in several application fields. Here, we present new investigations of laser-assisted etching in Eagle XG glass showing good etching conditions at low repetition rates, where thermal effects can be neglected, and low irradiation speeds, which allow for complex microchannel network formation.
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