4.6 Article

Procedure Optimization for Organic Ambipolar Transistor: Laterally Aligned Micro n-/p-Channels via Dry Soft-Lithographic Process

Journal

ADVANCED ELECTRONIC MATERIALS
Volume 8, Issue 5, Pages -

Publisher

WILEY
DOI: 10.1002/aelm.202101041

Keywords

ambipolar transistor; balanced ambipolar device; bi-component active layer; laterally stacked n-; p-channels; organic compatible patterning; sharp channel interface

Funding

  1. Creative Research Initiative Program through the National Research Foundation of Korea (NRF) - Ministry of Science, ICT & Future Planning (MSIP) [2009-0081571[RIAM0417-20150013]]
  2. Basic Science Research Program through the NRF - Ministry of Science, ICT and Future Planning [2017R1E1A1A01075372[0417-20210043]]

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This study introduces a novel fabrication process of patterned taping using all-dry soft lithography to ensure the formation of sharp interface and preserve the original performance of individual semiconductor channels. Unlike other bi-component active layer devices, the laterally aligned n-/p-channel in this study secures clear ambipolarity.
In spite of the large potential of ambipolar transistors constituted of laterally aligned unipolar n-/p-channel semiconductors, it is hard to secure the full electrical performance of each semiconductor channel by the risk of intermixing which leads to low crystallinity. Here, a novel fabrication process of patterned taping is proposed which ensures the formation of sharp interface and thus preserving the original performance of individual channels-laterally aligned micro n-/p-channels via all-dry soft-lithographic process. Different from other bi-component active layer devices, such as vertically stacked n-/p-bilayer and n-/p-blend film, laterally aligned n-/p-channel of this work secures clear ambipolarity because both the n-/p-channels are directly laid over a common gate dielectric surface. Essentially, laterally aligned n-/p-channels constructed by patterned taping are free from lateral channel mixing or broadening effect different from other processes such as wet-processing and fine metal mask (FMM) patterning. In this work, a novel patterned taping method of laterally aligned n-/p-channel transistors and also their optimized transistor performances compared with other bi-component devices using the same set of n- and p-type semiconductor materials is demonstrated.

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